CeNTech R & D

Münster Nanofabrication Facility

The Münster Nanofabrication Facility (MNF) is a core science facility located at CeNTech and at the Center for Soft Nanoscience (SoN). The cleanroom facilities are equipped with a state-of-the-art machine park for advanced nanofabrication and nanoanalysis like the Raith EBPG5150 electron beam lithography system and the TITAN Themis G3 60-300 TEM


electron beam lithography system (Raith EBPG5150)?
detailed information