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Münster Nanofabrication Facility

The new etching system

May 4, 2017

The Münster Nanofabrication Facility (MNF) is a core science facility located at CeNTech and at the new Center for Soft Nanoscience (SoN). The cleanroom facilities are equipped with a state-of-the-art machine park for advanced nanofabrication like the MicroSys 200 from Meyer Burger. In addition the new electron-beam lithography instrument EBPG5150 (Raith) will be brought into service soon.

detailed information

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D – 48149 Münster
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